Single frequency DC interferometer system
Single
frequency DC interferometer system
It
uses a single frequency circular polarised laser beam.
On
reaching the polarising beam splitter, the beam splits into two components, the
reflected beam being vertically polarised light and the transmitted beam being
horizontally polarised light.
These
two beams referred to as reference arm and measurement arm respectively travel
to their retroreflectors and are then reflected back towards the beam splitter.
The
recombined beam at beam splitter consists of two superimposed beams of
different polarisation; one component vertically polarised having travelled
around reference arm and other component horizontally polarised having
travelled around the measurement arm.
These
two beams being differently polarised do not interfere.
The
recombined beam then passes through a quarter wave plate which causes the two
beams to interfere with one another to produce a beam of plane polarised light.
The
angular orientation of the plane of this polarised light depends on the phase
difference between the light in the two returned beams.
The
direction of plane of polarisation spin is dependent on the direction of
movement of the moving retroreflector.
The
beam after quarter wave plate is split into three polarisation sensitive
detectors.
As
the plane of polarised light spins, each detector produces a sinusoidal output
waveform.
The
polarisation sensitivity of the detectors can be set so that their outputs have
relative phases of 0°, 90°, and 180°.
The
outputs of three detectors can be used to distinguish the direction of movement
and also the distance moved by the moving retroreflector attached to the
surface whose displacement is to be measured.
For
linear measurements (positional accuracy or velocity), the retroreflector is
attached to the body moving along the linear axis. For angular measurement (For
pitch and yaw), the angular beam splitter is placed in the path between the
laser head and the angular reflector.
In
this way it is possible to measure flatness, straightness, rotatory axis
calibration.
Arrangements
also need to be made for environmental compensation because the refractive
index of the air varies with temperature, pressure and humidity.
Interferometry
is now an established and well developed technique for high accuracy and high
resolution measurement.